US Patent Issued to Applied Materials on Aug. 18 for "Machine learning model based controller for rapid thermal processing chamber" (American, Indian Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,711,290, issued on Aug. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Machine learning model based controller for rapid thermal processing chamber" was invented by Preetham Rao (Morgan Hill, Calif.), Raechel Tan (Santa Clara, Calif.), Ananda Sankar Kundu (Kolkata, India) and Wolfgang Aderhold (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include a method of developing a reduced order model (ROM) for a model based controller. In an embodiment, the method comprises obtaining a design of a plant, and building a detailed model of the thermal network of the plant from the design of the p...