US Patent Issued to Applied Materials on Aug. 18 for "Carbon replenishment of silicon-containing material" (California Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,713,850, issued on Aug. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Carbon replenishment of silicon-containing material" was invented by Shankar Venkataraman (San Jose, Calif.), Zeqing Shen (San Jose, Calif.), Susmit Singha Roy (Campbell, Calif.), Abhijit Basu Mallick (Fremont, Calif.), Lakmal C. Kalutarage (San Jose, Calif.), Jongbeom Seo (San Jose, Calif.), Sai Hooi Yeong (Cupertino, Calif.), Benjamin Colombeau (San Jose, Calif.) and Balasubramanian Pranatharthiharan (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary methods of semiconductor processing may include etching a portion of a silicon-containing...