US Patent Issued to Applied Materials on Aug. 18 for "Bipolar electrostatic chuck electrode designs" (California Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,161, issued on Aug. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Bipolar electrostatic chuck electrode designs" was invented by Jian Li (Fremont, Calif.), Kallol Bera (Fremont, Calif.), Edward P. Hammond (Hillsborough, Calif.), Dmitry A. Dzilno (Sunnyvale, Calif.), Juan Carlos Rocha-Alvarez (San Carlos, Calif.) and Xiaopu Li (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary substrate support assemblies may include an electrostatic chuck body defining a substrate support surface that defines a substrate seat. The assemblies may include a support stem coupled with the electrostatic chuck body. The assembl...