US Patent Issued to Applied Materials on Aug. 11 for "Substrate measurement systems having substrate holders" (California Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,704,407, issued on Aug. 11, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Substrate measurement systems having substrate holders" was invented by Chenfei Hu (Milpitas, Calif.), Chao Liu (San Jose, Calif.), Chien-Min Liao (San Jose, Calif.), Marc David Shull (Los Gatos, Calif.) and Michael Kutney (Santa Cruz, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus includes a substrate holder having a surface to receive a substrate. The surface has a texture that causes an optical beam incident on the surface to scatter in at least one direction away from an optical detector to be located above the substrate holder."

The paten...