ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,707,939, issued on Aug. 11, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Substrate holder systems" was invented by Chenfei Hu (Milpitas, Calif.), Chao Liu (San Jose, Calif.), Chien-Min Liao (San Jose, Calif.), Marc David Shull (Los Gatos, Calif.), Michael Kutney (Santa Cruz, Calif.), Thomas K. Cho (Los Altos, Calif.) and Christopher Laurent Beaudry (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments described herein relate to substrate holder systems. An apparatus includes a substrate holder having a surface to receive a substrate. The surface has a texture that causes an optical beam incident on the surface to...