ALEXANDRIA, Va., April 7 -- United States Patent no. D1,121,576, issued on April 7, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Purge ring for a substrate processing chamber" was invented by Geraldine Vasquez (San Jose, Calif.), Yi Xu (San Jose, Calif.), Dien-yeh Wu (San Jose, Calif.), Aixi Zhang (Sunnyvale, Calif.), Jallepally Ravi (San Ramon, Calif.) and Yu Lei (Belmont, Calif.).
The patent was filed on July 14, 2022, under Application No. D/846,296.
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