US Patent Issued to Applied Materials on April 7 for "Process chambers having multiple cooling plates" (American, Indian Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,597,587, issued on April 7, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Process chambers having multiple cooling plates" was invented by Dinkesh Huderi Somanna (San Jose, Calif.), Dan Deyo (Austin, Texas), Vishwas Kumar Pandey (Bangalore, India) and Ala Moradian (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of process chambers having cooling plate are provided herein. In some embodiments, a process chamber includes: a chamber body defining an interior volume therein, the chamber body having a view port side having an opening configured as a view port, a pump side having a pump port, and a shutter side op...