ALEXANDRIA, Va., April 21 -- United States Patent no. 12,610,587, issued on April 21, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Backside power rail to deep vias" was invented by Suketu Arun Parikh (San Jose, Calif.), Ashish Pal (San Ramon, Calif.), El Mehdi Bazizi (San Jose, Calif.), Andrew Yeoh (Portland, Ore.), Nitin K. Ingle (San Jose, Calif.), Arvind Sundarrajan (Singapore), Guan Huei See (Singapore), Martinus Maria Berkens (Eindhoven, Netherlands), Sameer A. Deshpande (Santa Clara, Calif.), Balasubramanian Pranatharthiharan (San Jose, Calif.) and Yen-Chu Yang (Santa Clara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Semiconductor devices and methods of manufacturing the sa...