US Patent Issued to Applied Materials on April 14 for "Monolithic substrate support having porous features and methods of forming the same" (California Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,600,682, issued on April 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Monolithic substrate support having porous features and methods of forming the same" was invented by Arvinder Manmohan Singh Chadha (San Jose, Calif.) and Christopher Beaudry (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of forming a substrate support for use in a processing chamber includes forming a porous region in each of a plurality of ceramic green sheets, stacking the plurality of ceramic green sheets, each having the porous region formed therein, to form a ceramic laminate, and sintering the ceramic laminate to form a monolith...