ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,787,701, issued on Nov. 3, was assigned to Applied Materials Israel Ltd. (Rehovot, Israel).
"Substrate pre-aligner" was invented by Itamar Orenbuch (Rehovot, Israel), Avi Aboodi (Rehovot, Israel) and Binyamin Bejell (Rehovot, Israel).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate alignment system that includes (i) an illumination unit that is configured to illuminate an illuminated region that comprises an entire edge of a substrate; (ii) a sensing unit having a field of view that covers the entire edge of the substrate even when the substrate is misaligned, the sensing unit includes a sensor that is preceded by a fish eye lens, the sensor is ...