ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,782,704, issued on Nov. 3, was assigned to Applied Materials Israel Ltd. (Rehovot, Israel).
"Auto focus system having a splitter" was invented by Menachem Lapid (Rehovot, Israel), Itay Langstadter (Rehovot, Israel), Roy Kaner (Rehovot, Israel) and Roman Naidis (Rehovot, Israel).
According to the abstract* released by the U.S. Patent & Trademark Office: "An auto-focus system that includes (a) an illumination path that is configured to illuminate a sample with illumination beams that form multiple spot arrays on the sample that includes an upstream set of spot arrays formed on a first side of an imaging area, and a downstream set of spot arrays formed on another side of the imaging area...