ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,713,877, issued on Aug. 18, was assigned to APET Co. LTD. (Pyeongtaek-si, South Korea).
"Chuck assembly" was invented by Tae Woo Kim (Hwaseong-si, South Korea), Sang Su Lee (Osan-si, South Korea) and Jae Hoon Hwang (Yongin-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A chuck assembly according to an embodiment of the present invention includes: a rotary table on which a substrate is mounted; a rotating part concentric with a rotation center of the rotary table; and a chuck pin supporting the substrate, wherein the rotary table may include a protrusion protruding upward from a surface facing the substrate, the chuck pin may be coupled t...