ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,704,373, issued on Aug. 11, was assigned to Analog Devices Inc. (Wilmington, Mass.).
"Drive and sense stress relief apparatus" was invented by Gaurav Vohra (Sudbury, Mass.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A MEMS device is provided comprising a mass configured to move along a first axis and a second axis substantially perpendicular to the first axis; a drive structure coupled to the mass and configured to cause the mass to move along the first axis; a sense structure coupled to the mass and configured to detect motion of the mass along the second axis; a stress relief structure coupled to one of the drive structure or the sense structure; a...