US Patent Issued to AIXTRON on July 28 for "Wall-cooled gas-inlet element for a CVD reactor" (German, British Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,602, issued on July 28, was assigned to AIXTRON SE (Herzogenrath, Germany).

"Wall-cooled gas-inlet element for a CVD reactor" was invented by Marcel Kollberg (Wurselen, Germany), Benjamin David Wright (Cambridge, Great Britain), Merim Mukinovic (Wurselen, Germany), Barry O'Neil (Herzogenrath, Germany) and Marc Plummer (Cambridgeshire, Great Britain).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas inlet element for a CVD reactor includes a cylindrical main body, which together with an outer wall, forms a gas outlet face. The outer wall surrounds at least one gas distribution chamber. A plurality of gas outlet openings originating in the gas distr...