US Patent Issued to ADVANTEC on July 14 for "Stage for heating and cooling object" (Japanese Inventor)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,680,167, issued on July 14, was assigned to ADVANTEC Co. LTD. (Tokyo).

"Stage for heating and cooling object" was invented by Yuji Masuda (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A stage for heating and cooling an object installed in a chamber 1 includes : a stage body 5, 6 that has a mounting surface on which an object is mounted; a heating unit 7 for heating the mounting surface; and a cooling unit 8 for cooling the mounting surface. The stage body 5, 6 also has a first groove 10 into which the heating unit is inserted and a second groove 10 into which the cooling unit is inserted. The gap between the first groove and the heating unit and...