ALEXANDRIA, Va., March 24 -- United States Patent no. 12,583,738, issued on March 24, was assigned to AAC Technologies Pte. Ltd. (Singapore).
"MEMS diaphragm and MEMS sensor" was invented by Anup Patel (Eb, Great Britain), Scott Lyall Cargill (Eb, Great Britain) and Euan James Boyd (Eb, Great Britain).
According to the abstract* released by the U.S. Patent & Trademark Office: "An MEMS diaphragm and an MEMS sensor. The MEMS diaphragm includes: a main diaphragm including a main body sensing portion and beam portions, and the beam portions are connected to an outer edge of the main body sensing portion; an additional material layer provided on the beam portions or provided on both an edge of the main body sensing portion and on the beam port...