ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,729,111, issued on Sept. 8, was assigned to 3C PROJECT MANAGEMENT Ltd. (Greystones, Ireland).
"MEMS device with integrated CMOS circuit" was invented by Gregory John Mcavoy (Greystones County, Ireland).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of manufacturing a MEMS device, the MEMS device comprising a movable Micro-Electro-Mechanical piezoelectric component and a CMOS circuit configured to be in conductive communication with the Micro-Electro-Mechanical component. A plurality of CMOS circuit layers are formed on a substrate to form the CMOS circuit, the plurality of CMOS circuit layers comprising a plurality of CMOS passivation and metall...