ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,535,743, issued on Jan. 27.
"Radiation source arrangement and metrology device" was invented by Ali Alsaqqa (Norwalk, Conn.), Aabid Patel (Stamford, Conn.), Patrick Sebastian Uebel (Marloffstein, Germany), Amir Abdolvand (Eindhoven, Netherlands), Paulus Antonius Andreas Teunissen (Eindhoven, Netherlands) and Wisham F Kadhim (Shelton, Conn.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A radiation source arrangement including: a radiation source operable to generate source radiation including source energy pulses; and at least one non-linear energy-filter operable to filter the source radiation to obtain filtered radiation including filtered energy puls...