GENEVA, July 6 -- DAEJEON UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION FOUNDATION filed a patent application (KR2025/004321) for “WAFER SENSOR USING QUARTZ RESONATOR CAPABLE OF MONITORING PLASMA PROCESS”. With publication no. WO/2026/141782, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: G01B 17/02
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Disclaimer: Curated by HT Syndication....