INTERNATIONAL PATENT: VEECO INSTRUMENTS INC. FILES APPLICATION FOR "GAS INLET ASSEMBLY FOR EPITAXIAL REACTOR"

GENEVA, May 12 -- VEECO INSTRUMENTS INC. (1 Terminal DrivePlainview, New York 11803) filed a patent application (PCT/US2025/053514) for "GAS INLET ASSEMBLY FOR EPITAXIAL REACTOR" on Oct 31, 2025. With publication no. WO/2026/096890, the details related to the patent application was published on May 07, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): NILSSON, Roger (Drevkarlsgranden 22226 38 Lund), SPENGLER, Richard (Mollevangsvagen 79222 40 Lund), ROSBERG, Jonas (Lagerbrings vag 7B222 40 Lund)

Abstract: A gas inlet assembly for a reactor (10) for epitaxial growth of semiconductor wafers, th...