GENEVA, June 26 -- LAM RESEARCH AG filed a patent application (EP2025/085355) for “UV-ASSISTED WAFER CLEANING METHOD AND APPARATUS”. With publication no. WO/2026/120016, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: H10P 70/00
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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