International Patent: UPPER ELECTRODE ASSEMBLY AND SEMICONDUCTOR PROCESS DEVICE

GENEVA, Nov. 6 -- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. filed a patent application (CN2026/092234) for “UPPER ELECTRODE ASSEMBLY AND SEMICONDUCTOR PROCESS DEVICE”. With publication no. WO/2026/228404, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: H01J 37/34

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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