INTERNATIONAL PATENT: TOMOEGAWA CORPORATION, 株式会社巴川コーポレーション FILES APPLICATION FOR "ELECTROSTATIC CHUCK, SEMICONDUCTOR MANUFACTURING DEVICE AND PLASMA TREATMENT DEVICE"

GENEVA, Feb. 23 -- TOMOEGAWA CORPORATION (2-1-3, Kyobashi, Chuo-ku, Tokyo1048335), 株式会社巴川コーポレーション (東京都中央区京橋二丁目１番３号) filed a patent application (PCT/JP2025/027117) for "ELECTROSTATIC CHUCK, SEMICONDUCTOR MANUFACTURING DEVICE, AND PLASMA TREATMENT DEVICE" on Jul 31, 2025. With publication no. WO/2026/038467, the details related to the patent application was published on Feb 19, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Org...