INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, TOKYO ELECTRON U.S. HOLDINGS, INC. FILES APPLICATION FOR "SYSTEM AND METHOD FOR PLASMA PULSING SCHEME SELECTION AND OPTIMIZATION"

GENEVA, May 5 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-kuTokyo, 107-6325), TOKYO ELECTRON U.S. HOLDINGS, INC. (401 S 1st St, Suite 900Austin, Texas 78704) filed a patent application (PCT/US2025/037489) for "SYSTEM AND METHOD FOR PLASMA PULSING SCHEME SELECTION AND OPTIMIZATION" on Jul 14, 2025. With publication no. WO/2026/089794, the details related to the patent application was published on Apr 30, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WANG, Qiang (401 S 1st St, Suite 900Austin, Texas 78704), SRIDHAR, Shyam (401 S 1st St, Suite 900Austin, Texas 78704), LIN, Tsung-Ch...