INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, TOKYO ELECTRON U.S. HOLDINGS, INC. FILES APPLICATION FOR "STRESS CONTROL OF HIGH-DENSITY CARBON HARDMASK (CHM)"

GENEVA, Dec. 2 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-kuTokyo, 107-6325), TOKYO ELECTRON U.S. HOLDINGS, INC. (401 S 1st St, Suite 900Austin, Texas 78704) filed a patent application (PCT/US2025/019786) for "STRESS CONTROL OF HIGH-DENSITY CARBON HARDMASK (CHM)" on Mar 13, 2025. With publication no. WO/2025/244725, the details related to the patent application was published on Nov 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ZHAO, Jianping (401 S 1st St, Suite 900Austin, Texas 78704), SCHLECHTE, Charles (401 S 1st St, Suite 900Austin, Texas 78704), CARROLL, John (401 S 1s...