INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, 東京エレクトロン株式会社, RKC INSTRUMENT INC., 理化工業株式会社 FILES APPLICATION FOR "SUBSTRATE PROCESSING DEVICE AND TEMPERATURE CONTROL METHOD"

Posted On: 2026-04-28

GENEVA, April 28 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku, Tokyo1076325), 東京エレクトロン株式会社 (東京都港区赤坂五丁目３番１号), RKC INSTRUMENT INC. (16-6, Kugahara 5-chome, Ohta-ku, Tokyo1468515), 理化工業株式会社 (東京都大田区久が原５丁目１６番６号) filed a patent application (PCT/JP2025/035486) for "SUBSTRATE PROCESSING DEVICE AND TEMPERATURE CONTROL METHOD" on Oct 06, 2025. With publication no. WO/2026/083856, the det...

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INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, 東京エレクトロン株式会社, RKC INSTRUMENT INC., 理化工業株式会社 FILES APPLICATION FOR "SUBSTRATE PROCESSING DEVICE AND TEMPERATURE CONTROL METHOD"