INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, 東京エレクトロン株式会社, NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY, 国立大学法人静岡大学 FILES APPLICATION FOR "HEAT TRANSFER SHEET, SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING HEAT TRANSFER SHEET"

Posted On: 2026-03-10

GENEVA, March 10 -- TOKYO ELECTRON LIMITED (3-1, Akasaka 5-chome, Minato-ku, Tokyo1076325), 東京エレクトロン株式会社 (東京都港区赤坂五丁目３番１号), NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY (836 Ohya, Suruga-ku, Shizuoka-shi, Shizuoka4228529), 国立大学法人静岡大学 (静岡県静岡市駿河区大谷８３６) filed a patent application (PCT/JP2025/029304) for "HEAT TRANSFER SHEET, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR MANUFACTURING HE...

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INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, 東京エレクトロン株式会社, NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY, 国立大学法人静岡大学 FILES APPLICATION FOR "HEAT TRANSFER SHEET, SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING HEAT TRANSFER SHEET"