GENEVA, Sept. 18 -- LAM RESEARCH CORPORATION filed a patent application (US2026/017259) for “SYSTEMS AND TECHNIQUES FOR GAS DELIVERY FOR SEMICONDUCTOR PROCESSING”. With publication no. WO/2026/187647, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: C23C 16/455
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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