GENEVA, July 2 -- KLA CORPORATION filed a patent application (US2025/059295) for “SYSTEM AND METHOD FOR SPECTROSCOPIC CRITICAL DIMENSION MEASUREMENT WITH TWO-DIMENSIONAL DETECTOR ASSEMBLY”. With publication no. WO/2026/136136, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: G01N 21/88
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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