GENEVA, Oct. 30 -- NEOVAC GMBH filed a patent application (EP2026/061264) for “SUBSTRATE TRANSPORTATION ARRANGEMENT FOR A SUBSTRATE TREATMENT SYSTEM”. With publication no. WO/2026/224107, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: C23C 14/56
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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