INTERNATIONAL PATENT: STICHTING VU, STICHTING NEDERLANDSE WETENSCHAPPELIJK ONDERZOEK INSTITUTEN, UNIVERSITEIT VAN AMSTERDAM, ASML NETHERLANDS B.V. FILES APPLICATION FOR "A METHOD FOR SEMICONDUCTOR METROLOGY USING POLARIZED RADIATION"

GENEVA, April 27 -- STICHTING VU (De Boelelaan 11051081 HV Amsterdam), STICHTING NEDERLANDSE WETENSCHAPPELIJK ONDERZOEK INSTITUTEN (Winthontlaan 23526 KV Utrecht), UNIVERSITEIT VAN AMSTERDAM (Spui 211012 WX Amsterdam), ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/079116) for "A METHOD FOR SEMICONDUCTOR METROLOGY USING POLARIZED RADIATION" on Oct 09, 2025. With publication no. WO/2026/082547, the details related to the patent application was published on Apr 23, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KOOLEN, Armand, Eugene, Albert (P.O....