International Patent: STAGE DEVICE, CHARGED PARTICLE BEAM DEVICE INCLUDING SAME, AND OPTICAL INSPECTION DEVICE

GENEVA, Sept. 24 -- HITACHI HIGH-TECH CORPORATION filed a patent application (JP2025/010132) for “STAGE DEVICE, CHARGED PARTICLE BEAM DEVICE INCLUDING SAME, AND OPTICAL INSPECTION DEVICE”. With publication no. WO/2026/196360, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: G12B 5/00

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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