International Patent: SPUTTER TARGET FOR PROVIDING A TARGET MATERIAL FOR COATING A SUBSTRATE IN A SPUTTERING PROCESS, COMBINATION, SPUTTERING APPARATUS, AND SPUTTERING METHOD

GENEVA, Aug. 14 -- GFE FREMAT GMBH filed a patent application (EP2026/052858) for “SPUTTER TARGET FOR PROVIDING A TARGET MATERIAL FOR COATING A SUBSTRATE IN A SPUTTERING PROCESS, COMBINATION, SPUTTERING APPARATUS, AND SPUTTERING METHOD”. With publication no. WO/2026/166995, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: C23C 14/18

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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