GENEVA, July 2 -- CARL ZEISS SMT GMBH filed a patent application (EP2025/084927) for “SEMICONDUCTOR TECHNOLOGY INSTALLATION AND METHOD FOR INSPECTING AN OPTICAL SURFACE”. With publication no. WO/2026/131069, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: G03F 7/20
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Disclaimer: Curated by HT Syndication....