GENEVA, Aug. 31 -- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. filed a patent application (CN2025/135327) for “RADIO FREQUENCY FEED APPARATUS AND SEMICONDUCTOR PROCESS EQUIPMENT”. With publication no. WO/2026/108761, here are the other details related to the patent application:
Kind: Corrected version of pamphlet [A9]
IPC: H01J 37/32
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Disclaimer: Curated by HT Syndication....