GENEVA, Dec. 2 -- PSK INC. (48, Samsung 1-ro 4-gilHwaseong-siGyeonggi-do 18449), 피에스케이 주식회사 (경기도화성시삼성1로4길 48) filed a patent application (PCT/KR2025/006543) for "LOAD LOCK CHAMBER AND SUBSTRATE PROCESSING APPARATUS INCLUDING SAME" on May 14, 2025. With publication no. WO/2025/244346, the details related to the patent application was published on Nov 27, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): KIM, Mi Kyoung (48, Samsung 1-ro 4-gilHwaseong-siGyeonggi-do ...