International Patent: PROCESS CHAMBER TEMPERATURE CONTROL METHOD, POWER ADJUSTMENT APPARATUS, AND SEMICONDUCTOR PROCESS DEVICE

GENEVA, July 1 -- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. filed a patent application (CN2025/128146) for “PROCESS CHAMBER TEMPERATURE CONTROL METHOD, POWER ADJUSTMENT APPARATUS, AND SEMICONDUCTOR PROCESS DEVICE”. With publication no. WO/2026/123939, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: H10P 95/90

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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