GENEVA, Oct. 1 -- ENTEGRIS, INC. filed a patent application (US2025/019760) for “PRECURSOR DELIVERY DEVICE WITH HEATING ELEMENT AND RELATED METHODS”. With publication no. WO/2026/192584, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: C23C 16/448
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Disclaimer: Curated by HT Syndication....