GENEVA, May 10 -- PICOSUN OY (Tietotie 302150 Espoo) filed a patent application (PCT/FI2025/060004) for "SUBSTRATE PROCESSING APPARATUS AND METHOD" on Oct 06, 2025. With publication no. WO/2026/093645, the details related to the patent application was published on May 07, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): NASI, Mikko (c/o Picosun OyMasalantie 36502430 Masala), BLOMBERG, Tom (c/o Picosun OyMasalantie 36502430 Masala), VAHA-OJALA, Timo (c/o Picosun OyMasalantie 36502430 Masala)
Abstract: A substrate processing apparatus (100) and a method, comprising a reaction chamber (110) for...