INTERNATIONAL PATENT: OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED FILES APPLICATION FOR "MEASURING THIN FILM THICKNESS"

GENEVA, Dec. 16 -- OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED (Tubney WoodsAbingdon Oxon OX13 5QX) filed a patent application (PCT/GB2025/051217) for "MEASURING THIN FILM THICKNESS" on Jun 04, 2025. With publication no. WO/2025/253113, the details related to the patent application was published on Dec 11, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GOODYEAR, Andrew L (C/O Oxford Instruments Nanotechnology LimitedTubney WoodsAbingdon Oxon OX13 5QX)

Abstract: A method of measuring the thickness of a thin film structure during deposition or etching thereof, the method comprising: illu...