International Patent: OPTICAL ARRANGEMENT FOR DETERMINING A BEAM CAUSTIC OF A LASER BEAM, METHOD FOR DETERMINING A BEAM CAUSTIC OF A LASER BEAM WITH AN OPTICAL ARRANGEMENT, EUV DRIVER LASER, EUV LIGHT GENERATION SYSTEM AND METHOD FOR PRODUCING A SEMICONDUCTOR INTERMEDIATE PRODUCT OR A MICROCHIP

GENEVA, July 27 -- TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE filed a patent application (EP2026/050589) for “OPTICAL ARRANGEMENT FOR DETERMINING A BEAM CAUSTIC OF A LASER BEAM, METHOD FOR DETERMINING A BEAM CAUSTIC OF A LASER BEAM WITH AN OPTICAL ARRANGEMENT, EUV DRIVER LASER, EUV LIGHT GENERATION SYSTEM AND METHOD FOR PRODUCING A SEMICONDUCTOR INTERMEDIATE PRODUCT OR A MICROCHIP”. With publication no. WO/2026/153894, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: G01J 1/04

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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