GENEVA, April 6 -- MYCRONIC AB (Box 3141183 03 TABY) filed a patent application (PCT/EP2025/077134) for "METHOD TO PERFORM A SWEEPING MOTIONS IN MICROLITHOGRAPHY" on Sep 23, 2025. With publication no. WO/2026/068439, the details related to the patent application was published on Apr 02, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): WALTHER, Jonas (Nackrosvagen 26169 37 Solna)
Abstract: The present disclosure provides a method to perform a non-orthogonal sweeping motion in a microlithography system. The method comprises measuring a position deviation of the tool head relative the stage in ...