GENEVA, Nov. 5 -- MKS INSTRUMENTS, INC. (2 Tech Drive, Suite 201Andover, Massachusetts 01810) filed a patent application (PCT/US2025/025670) for "TOROIDAL PLASMA SOURCE AND METHOD OF USING THE SAME" on Apr 22, 2025. With publication no. WO/2025/226620, the details related to the patent application was published on Oct 30, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HILL, Gordon (2 Tech Drive, Suite 201Andover, Massachusetts 01810), COLLINS, Ron (2 Tech Drive, Suite 201Andover, Massachusetts 01810)
Abstract: A plasma source, comprises a plasma source body comprising a plurality of magnet...