INTERNATIONAL PATENT: MKS INC. FILES APPLICATION FOR "SYSTEM AND METHOD FOR REDUCING INTERMODULATION DISTORTION IN A PLASMA CHAMBER"

GENEVA, May 12 -- MKS INC. (2 Tech DriveAndover, Massachusetts 01810) filed a patent application (PCT/US2025/052157) for "SYSTEM AND METHOD FOR REDUCING INTERMODULATION DISTORTION IN A PLASMA CHAMBER" on Oct 23, 2025. With publication no. WO/2026/096271, the details related to the patent application was published on May 07, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): RADOMSKI, Aaron (2 Tech DriveAndover, Massachusetts 01810), SWENSON, Aaron (2 Tech DriveAndover, Massachusetts 01810), GITLIN, Benjamin (2 Tech DriveAndover, Massachusetts 01810), FISK, Larry (2 Tech DriveAndover, Massachuse...