GENEVA, Aug. 7 -- CARL ZEISS SMT GMBH filed a patent application (EP2026/050686) for “METHOD FOR REPLACING A FIRST MODULE WITH A SECOND MODULE OF A LITHOGRAPHY APPARATUS”. With publication no. WO/2026/162286, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: G03F 7/00
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Disclaimer: Curated by HT Syndication....