International Patent: METHOD AND STATION FOR CLEANING A CARRIER POD FOR THE ATMOSPHERIC TRANSPORT AND STORAGE OF SEMICONDUCTOR SUBSTRATES

GENEVA, June 26 -- PFEIFFER VACUUM filed a patent application (EP2025/080995) for “METHOD AND STATION FOR CLEANING A CARRIER POD FOR THE ATMOSPHERIC TRANSPORT AND STORAGE OF SEMICONDUCTOR SUBSTRATES”. With publication no. WO/2026/119468, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: H10P 72/00

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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