INTERNATIONAL PATENT: MERCK PATENT GMBH FILES APPLICATION FOR "ORGANOMETALLIC TIN OXO CARBOXYLATE CLUSTERS FOR EUV LITHOGRAPHY"

GENEVA, May 4 -- MERCK PATENT GMBH (Frankfurter Strasse 25064293 Darmstadt) filed a patent application (PCT/EP2025/080089) for "ORGANOMETALLIC TIN OXO CARBOXYLATE CLUSTERS FOR EUV LITHOGRAPHY" on Oct 17, 2025. With publication no. WO/2026/087374, the details related to the patent application was published on Apr 30, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHEN, Jiawei (c/o EMD Performance Materials Corp.251 Little Falls DriveWILMINGTON, Delaware 19808), LICHTENBERGER, Niels (c/o Merck Electronics KGaAFrankfurter Strasse 25064293 DARMSTADT), HUDSON, Daniel (c/o Merck Electronics KGaAF...