GENEVA, July 6 -- CANON TOKKI CORPORATION filed a patent application (JP2025/038974) for “MASK UNIT, FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE”. With publication no. WO/2026/140528, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: C23C 14/04
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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