INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SYSTEMS AND TECHNIQUES FOR MONITORING PRECURSORS FOR SEMICONDUCTOR PROCESSING"

GENEVA, April 8 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/047757) for "SYSTEMS AND TECHNIQUES FOR MONITORING PRECURSORS FOR SEMICONDUCTOR PROCESSING" on Sep 24, 2025. With publication no. WO/2026/072700, the details related to the patent application was published on Apr 02, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GARCIA, Michel (c/o Lam Research Corporation4650 Cushing Pkwy.Fremont, California 94538), MANDIA, David Joseph (c/o Lam Research Corporation4650 Cushing Pkwy.Fremont, California 94538), CHANDRASEKHARAN, R...