INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SYSTEMS AND METHODS FOR PROVIDING AN HF RF SIGNAL TO AN UPPER ELECTRODE EXTENSION"

GENEVA, Jan. 20 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, CA 94538) filed a patent application (PCT/US2025/035802) for "SYSTEMS AND METHODS FOR PROVIDING AN HF RF SIGNAL TO AN UPPER ELECTRODE EXTENSION" on Jun 27, 2025. With publication no. WO/2026/015311, the details related to the patent application was published on Jan 15, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MARAKHTANOV, Alexei, M. (4650 Cushing ParkwayFremont, CA 94538), JI, Bing (4650 Cushing ParkwayFremont, CA 94538), LUCCHESI, Kenneth (4650 Cushing ParkwayFremont, CA 94538), HOLLAND, John (4650 Cushing Park...